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Transforming Computational Lithography with AC and AI -- Faster, More Accurate, and Energy-efficient

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์ €์ž

Saumyadip Mukhopadhyay, Kiho Yang, Kasyap Thottasserymana Vasudevan, Mounica Jyothi Divvela, Selim Dogru, Dilip Krishnamurthy, Fergo Treska, Werner Gillijns, Ryan Ryoung han Kim, Kumara Sastry, Vivek Singh

๐Ÿ’ก ๊ฐœ์š”

๋ฐ˜๋„์ฒด ์ œ์กฐ์˜ ํ•ต์‹ฌ ๊ณต์ •์ธ ๊ณ„์‚ฐ ๋ฆฌ์†Œ๊ทธ๋ž˜ํ”ผ๋Š” ์ดˆ๋ฏธ์„ธํ™”๋กœ ์ธํ•ด ๋ณต์žก์„ฑ์ด ์ฆ๊ฐ€ํ•˜๋ฉฐ ์ปดํ“จํŒ… ๋ฐ ์—๋„ˆ์ง€ ์†Œ๋น„ ๋ถ€๋‹ด์ด ์ปค์ง€๊ณ  ์žˆ์Šต๋‹ˆ๋‹ค. ๋ณธ ์—ฐ๊ตฌ๋Š” ๊ฐ€์† ์ปดํ“จํŒ…(AC)๊ณผ ์ธ๊ณต์ง€๋Šฅ(AI)์„ ๊ฒฐํ•ฉํ•˜์—ฌ ๊ณ„์‚ฐ ๋ฆฌ์†Œ๊ทธ๋ž˜ํ”ผ์˜ ์„ฑ๋Šฅ์„ ํ˜์‹ ์ ์œผ๋กœ ํ–ฅ์ƒ์‹œํ‚ค๋Š” ์ƒˆ๋กœ์šด ์ปดํ“จํŒ… ํ”Œ๋žซํผ์„ ์ œ์•ˆํ•ฉ๋‹ˆ๋‹ค. ์ œ์•ˆ๋œ cuLitho ํ”Œ๋žซํผ์€ 57๋ฐฐ์˜ ์ „๋ฐ˜์ ์ธ ๊ฐ€์†ํ™”๋ฅผ ๋‹ฌ์„ฑํ–ˆ์œผ๋ฉฐ, ์‹คํ—˜ ๊ฒฐ๊ณผ ๊ณต์ • ์ฐฝ 35% ๊ฐœ์„  ๋ฐ ์—ฃ์ง€ ์œ„์น˜ ์˜ค๋ฅ˜ 19% ๊ฐ์†Œ๋ฅผ ๋ณด์—ฌ์ฃผ์—ˆ์Šต๋‹ˆ๋‹ค.

๐Ÿ”‘ ์‹œ์‚ฌ์  ๋ฐ ํ•œ๊ณ„

โ€ข
๊ฐ€์† ์ปดํ“จํŒ…(AC)๊ณผ ์ธ๊ณต์ง€๋Šฅ(AI)์˜ ๊ฒฐํ•ฉ์€ ์ปดํ“จํŒ… ์ง‘์•ฝ์ ์ธ ๊ณผํ•™ ๋ฐ ์—”์ง€๋‹ˆ์–ด๋ง ์›Œํฌ๋กœ๋“œ์˜ ์ง€์† ๊ฐ€๋Šฅํ•œ ๋ฐœ์ „์„ ์œ„ํ•œ ์ฐจ์„ธ๋Œ€ ์ปดํ“จํŒ… ํ”Œ๋žซํผ์„ ์ œ๊ณตํ•ฉ๋‹ˆ๋‹ค.
โ€ข
NVIDIA cuLitho์™€ ๊ฐ™์€ ์ƒˆ๋กœ์šด ์†Œํ”„ํŠธ์›จ์–ด ์Šคํƒ ์„ค๊ณ„๋Š” ๊ณ„์‚ฐ ๋ฆฌ์†Œ๊ทธ๋ž˜ํ”ผ ๋ถ„์•ผ์—์„œ ํš๊ธฐ์ ์ธ ์„ฑ๋Šฅ ํ–ฅ์ƒ๊ณผ ๋”๋ถˆ์–ด ์ƒˆ๋กœ์šด ๋งˆ์Šคํฌ ์„ค๊ณ„ ๋ฐ ๊ณ ์ •๋ฐ€ ๊ณต์ •์„ ๊ฐ€๋Šฅํ•˜๊ฒŒ ํ•ฉ๋‹ˆ๋‹ค.
โ€ข
๋ณธ ์—ฐ๊ตฌ๋Š” AC์™€ AI๋ฅผ ํ™œ์šฉํ•œ ๋ฆฌ์†Œ๊ทธ๋ž˜ํ”ผ์˜ ์ด์ ์„ ์‹ค๋ฆฌ์ฝ˜ ์นฉ ์Šค์ผ€์ผ์—์„œ ์ •๋Ÿ‰์ ์œผ๋กœ ์ž…์ฆํ•œ ์ตœ์ดˆ์˜ ์‚ฌ๋ก€์ด์ง€๋งŒ, ์‹ค์ œ ์‚ฐ์—… ํ˜„์žฅ์— ์ ์šฉ๋˜๊ธฐ ์œ„ํ•ด์„œ๋Š” ์ถ”๊ฐ€์ ์ธ ๊ฒ€์ฆ ๋ฐ ์ตœ์ ํ™” ๊ณผ์ •์ด ํ•„์š”ํ•  ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค.
๐Ÿ‘